Micro-Mirror Arrays
AssigneeImec Vzw
InventorsMurali Jayapala, Geert Van der Plas, Veronique Rochus, Xavier Rottenberg, Simone Severi
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AssigneeImec Vzw
InventorsMurali Jayapala, Geert Van der Plas, Veronique Rochus, Xavier Rottenberg, Simone Severi
Estimating the term…
Micro-mirror arrays configured for use in a variable focal length lens are described herein. An example variable focal length lens comprises a micro-mirror array having a plurality of micro-mirror element arranged in at least a first section and a second section. Each micro-mirror element has a tilt axis and comprises, on each of two opposing sides of the tilt axis, (i) at least one actuation electrode, (ii) at least one measurement electrode, and (iii) at least one stopper. Additionally, each micro-mirror element in the first section has a first tilt axis range, and each micro-mirror element in the second section has a second tilt axis range, with the first tilt axis range being less than the second tilt axis range.
1-7. (canceled)
A variable focal length lens comprising:
Dependencies are inferred from the claim text.