Focusing device
AssigneeOlympus Corporation
InventorsYosuke TAMURA, Toshiya KOMURO
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Abstract
A focusing device that includes a differential interference prism used in differential interference observation in a focusing detection optical system includes: a light source that emits light with which a measurement surface of an observation sample is irradiated; a photo detection unit that detects light from the measurement surface; a focusing detection unit that detects an error signal near a focusing point of the measurement surface on the basis of an output signal from the photo detection unit; and a condition changing unit that changes an acquisition condition of the error signal.
Claims8
A focusing device that includes a differential interference prism used in differential interference observation in a focusing detection optical system, the focusing device comprising:
- a light source that emits light with which a measurement surface of an observation sample is irradiated;
- a photo detection unit that detects light from the measurement surface;
- a focusing detection unit that detects an error signal near a focusing point of the measurement surface on the basis of an output signal from the photo detection unit;
- and
- a condition changing unit that changes an acquisition condition of the error signal.
Dependencies are inferred from the claim text.