Optical cantilever based analysis
AssigneeThe University of Western Australia
InventorsJohn Marcel Dell, Mariusz Martyniuk, Adrian John Keating, Gino Michael Putrino, Lorenzo Faraone, Dilusha Silva, Roger Jeffery
Life of this patent
Estimating the term…
Abstract
An optical sensor including a MEMS structure, and a grating coupled resonating structure positioned adjacent to the MEMS structure, the grating coupled resonating structure comprising an interrogating grating coupler configured to direct light towards the MEMS structure. The interrogating grating coupler is two dimensional, and the interrogating grating coupler and the MEMS structure form an optical resonant cavity.
Claims20
An optical sensor including:
- a MicroElectroMechanical Systems (MEMS) structure;
- and
- a grating coupled resonating structure positioned adjacent to the MEMS structure, the grating coupled resonating structure comprising an interrogating grating coupler configured to direct light towards the MEMS structure;
- wherein
- interrogating grating coupler is two dimensional;
- and
- the interrogating grating coupler and the MEMS structure form an optical resonant cavity.
A method of detecting a deflection of a MEMS structure, the method comprising the steps of:
- inputting an optical signal into an interrogating grating coupler, the interrogating grating coupler being arranged to form a resonant cavity with the MEMS structure;
- and
- analyzing the optical signal output from the interrogating grating coupler to determine a deflection of the MEMS structure;
- wherein
- the interrogating grating coupler is two-dimensional.
Dependencies are inferred from the claim text.