Cavity enhanced spectroscopy
AssigneeHewlett-Packard Development Company, L.P.
InventorsJames E. Abbott, JR., Alan T. Davis
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Abstract
The present disclosure describes cavity enhanced spectroscopy (CES) apparatuses, and systems, and methods of forming the same. An example of a CES apparatus includes a first partial reflector, an optical cavity to expose a sample to electromagnetic radiation below the first partial reflector, and a semiconductor wafer with the first partial reflector and the optical cavity formed thereon.
Claims15
A cavity enhanced spectroscopy apparatus, comprising:
- a first partial reflector;
- an optical cavity to expose a sample to electromagnetic radiation positioned below the first partial reflector;
- and
- a semiconductor wafer with the first partial reflector and the optical cavity formed thereon.
A method of forming a cavity enhanced spectroscopy apparatus, comprising:
- providing a number of electromagnetic radiation sources;
- forming an optical cavity, wherein forming the optical cavity comprises:
- forming a first substrate on an upper surface of a semiconductor wafer;
- forming the optical cavity above the first substrate;
- and
- forming a second substrate above the optical cavity.
A system for cavity enhanced spectroscopy, comprising:
- an optical cavity;
- an electromagnetic radiation source to emit electromagnetic radiation into the optical cavity;
- a first partial reflector to partially reflect electromagnetic radiation from the electromagnetic radiation source within the optical cavity;
- a sample delivery device to deliver a sample into the optical cavity;
- a semiconductor wafer with the optical cavity formed thereon;
- and
- an electromagnetic radiation detector to detect residual electromagnetic radiation following absorption of a fraction of the electromagnetic radiation by the sample.
The system of claim 11, wherein the emitted electromagnetic radiation and the residual electromagnetic radiation are substantially at the same frequency.
Dependencies are inferred from the claim text.