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US 2014/0368783 A1Published application
Liquid crystal modulator and inspection apparatus having the same
AssigneeSamsung Display Co., Ltd.
InventorsSuk Choi, Ohjeong Kwon, Sujin Kim, Jinwon Kim, SeungWook Nam, Jooyoung Yoon, Hyeokjin Lee
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Abstract
In an aspect, a liquid crystal modulator for an inspection apparatus for detecting a defect of a substrate is provided which includes a first substrate; an electrode provided on the first substrate; and a sensor layer provided between the first substrate and the electrode is provided. The sensor layer includes a polymer-stabilized blue phase liquid crystal.
Claims15
A liquid crystal modulator for an inspection apparatus to detect a defect of a substrate, comprising:
- a first substrate;
- an electrode provided on the first substrate;
- and
- a sensor layer provided between the first substrate and the electrode,
- wherein the sensor layer includes a polymer-stabilized blue phase liquid crystal.
2 more elements
An inspection apparatus which detects a defect of a substrate, comprising:
- a liquid crystal modulator provided on the substrate;
- a light emitting unit provided to be spaced apart from the liquid crystal modulator;
- a beam splitter provided between the liquid crystal modulator and the light emitting unit, wherein the beam splitter is configured to reflect a light from the light emitting unit to the liquid crystal modulator;
- and
- a measurement unit opposite to the liquid crystal modulator with the beam splitter being interposed between the measurement unit and the liquid crystal modulator, wherein the measurement unit is configured to sense a light from the liquid crystal modulator,
- wherein the liquid crystal modulator comprises:
- a first substrate;
- an electrode provided on the first substrate;
- and
- a sensor layer provided between the first substrate and the electrode,
- wherein the sensor layer includes a polymer-stabilized blue phase liquid crystal.
8 more elements
Dependencies are inferred from the claim text.