Liquid ejecting head, liquid ejecting apparatus, and piezoelectric element
AssigneeSeiko Epson Corporation
InventorsKoichi MOROZUMI, Akira KURIKI, Ichiro ASAOKA, Sayaka KIMURA
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Abstract
A liquid ejecting head includes a piezoelectric element including a first electrode, a piezoelectric layer overlying the first electrode with an orientation control layer therebetween, and a second electrode overlying the piezoelectric layer. The piezoelectric layer is made of a complex oxide having a perovskite structure including an A site containing lead and a B site containing zirconium and titanium. The orientation control layer is made of a complex oxide having a perovskite structure including an A site containing lanthanum and a B site containing nickel and titanium.
Claims11
A piezoelectric element comprising:
- a first electrode;
- an orientation control layer overlying the first electrode, the orientation control layer made of a complex oxide having a perovskite structure including an A site containing lanthanum and a B site containing nickel and titanium;
- a piezoelectric layer overlying the orientation control layer, the piezoelectric layer made of a complex oxide having a perovskite structure including an A site containing lead and a B site containing zirconium and titanium;
- and
- a second electrode overlying the piezoelectric layer.
Dependencies are inferred from the claim text.