Piezoelectric unit, liquid ejecting head, liquid ejecting apparatus and method of manufacturing piezoelectric unit
AssigneeSeiko Epson Corporation
InventorsHajime NAKAO, Eiji NATORI
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Abstract
A piezoelectric unit includes a diaphragm made of ceramics, a base portion having a pressure chamber in which the diaphragm is set to a wall and a piezoelectric element having a dielectric layer provided at the opposite side of the base portion with respect to the diaphragm. In the piezoelectric unit, the roughness of a crystal of the outermost interface at the side of the piezoelectric element of the diaphragm is further smoothened than that of a ceramics material which is included in the diaphragm more inside than the interface.
Claims9
A piezoelectric unit comprising:
- a diaphragm made of ceramics;
- a base portion having a pressure chamber in which the diaphragm is set to a wall;
- and
- a piezoelectric element having a dielectric layer provided at the opposite side of the base portion with respect to the diaphragm,
- wherein the roughness of a crystal of the outermost interface at the side of the piezoelectric element of the diaphragm is further smoothened than that of a ceramics material which is included in the diaphragm more inside than the interface.
A method of manufacturing a piezoelectric unit comprising:
- firstly forming a diaphragm and a base portion having a pressure chamber in which the diaphragm is set to a wall with a ceramics material;
- secondly forming an interface which is further smoothened than the roughness of a crystal of a ceramics material which is included in the diaphragm at the opposite side of the base portion side of the diaphragm;
- and
- thirdly forming a piezoelectric element having a dielectric layer at the opposite side of the base portion side with respect to the interface of the diaphragm.
Dependencies are inferred from the claim text.