Liquid ejection apparatus, nanoimprint system, and liquid ejection method
AssigneeFUJIFILM Corporation
InventorsKenichi KODAMA, Satoshi WAKAMATSU
Life of this patent
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Abstract
According an aspect of the present invention, when causing the liquid ejection head to perform a feeding operation along a first direction, the substrate is retracted outside the projected feeding region of the liquid ejection head and the supporting member thereof prior to starting the feeding operation of the liquid ejection head, preventing dusts and other foreign matters, generated as a result of the feeding operation of the liquid ejection head and the supporting member, from being deposited on a surface of the substrate onto which the liquid is to be deposited.
Claims15
A liquid ejection apparatus, comprising:
- a liquid ejection head which ejects functional liquid onto a substrate;
- a feeding device which has a supporting member to support the liquid ejection head and causes the liquid ejection head and the supporting member to perform a feeding operation in a first direction;
- a substrate moving device which moves the substrate along a second direction intersecting with the first direction;
- and
- a movement control device which controls the substrate moving device, wherein
- in a case where the functional liquid is ejected from the liquid ejection head, the movement control device controls the substrate moving device so as to move the substrate in the second direction immediately below the liquid ejection head, and
- in a case where the liquid ejection head and the supporting member are caused to perform the feeding operation in the first direction, the movement control device controls the substrate moving device so as to retract the substrate outside a projected feeding region where a feeding range of the liquid ejection head and the supporting member is projected downward in a perpendicular direction, prior to starting the feeding operation of the liquid ejection head and the supporting member.
A liquid ejection apparatus, comprising:
- a liquid ejection head which ejects functional liquid onto a substrate;
- a head rotating device which rotates the liquid ejection head within a plane parallel to a liquid ejection surface of the liquid ejection head;
- a rotation control device which controls the head rotating device so as to rotate the liquid ejection head, in accordance with a liquid droplet ejection pitch of the functional liquid to be deposited onto the substrate;
- a substrate moving device which moves the substrate along a first direction and a second direction intersecting with the first direction at a time of liquid ejection for ejecting the functional liquid from the liquid ejection head;
- and
- a movement control device which, in a case where the liquid ejection head is rotated, controls the substrate moving device so as to retract the substrate outside a projected rotation region where a range through which the liquid ejection surface passes when the liquid ejection head is rotated is projected downward in a perpendicular direction, prior to starting the rotation of the liquid ejection head.
A liquid ejection method for ejecting functional liquid from a liquid ejection head to a substrate, comprising:
- a functional liquid ejection step of ejecting the functional liquid from the liquid ejection head to the substrate by moving the substrate in a second direction perpendicular to a first direction immediately below the liquid ejection head ejecting the functional liquid;
- a substrate retracting step of retracting the substrate outside a projected feeding region where a feeding range of the liquid ejection head and a supporting member thereof is projected downward in a perpendicular direction;
- and
- a feeding step of causing the liquid ejection head and the supporting member to perform a feeding operation in the first direction after the substrate is retracted.
A liquid ejection method for ejecting functional liquid from a liquid ejection head to a substrate, comprising:
- a functional liquid ejection step of ejecting the functional liquid from the liquid ejection head to the substrate by moving the substrate in a second direction perpendicular to a first direction immediately below the liquid ejection head ejecting the functional liquid;
- a head rotating step of rotating the liquid ejection head within a plane parallel to a liquid ejection surface of the liquid ejection head, in accordance with a liquid droplet ejection pitch of the functional liquid to be deposited onto the substrate;
- and
- a substrate retracting step of, in a case where the liquid ejection head is rotated, retracting the substrate outside a projected rotation region where a range through which the liquid ejection surface passes when the liquid ejection head is rotated is projected downward in a perpendicular direction, prior to starting the rotation of the liquid ejection head.
Dependencies are inferred from the claim text.