Systems, devices, and methods for driving an interferometric modulator
AssigneeQUALCOMM MEMS Technologies, Inc.
InventorAlok Govil
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Abstract
This disclosure provides systems, methods, and apparatus for controlling the actuation of an analog interferometric modulator. In one aspect, a voltage may be determined from a sense electrode. A distance between one or more of the electrodes may be determined based on the voltage. The sense electrode may be capacitively coupled to another electrode, and may be implemented in a mirror of a movable layer of an interferometric modulator, or may be implemented in a floating fixed layer of an interferometric modulator.
Claims19
A device for modulating light, comprising:
- a first electrode coupled to a first voltage source;
- a second electrode coupled to a capacitor;
- a movable electrode disposed between and spaced apart from the first electrode and the second electrode, the movable electrode including a third electrode;
- a voltage sensor coupled to the second electrode;
- and
- a second voltage source coupled to the movable electrode.
A method of driving a device for modulating light, comprising:
- applying a first voltage to a first electrode;
- applying a second voltage to a movable electrode positioned between the first electrode and a second electrode, wherein the second electrode is coupled to a capacitor;
- and
- sensing a voltage of the second electrode.
A device for modulating light, comprising:
- means for applying a first voltage to a first electrode;
- means for applying a second voltage to a movable electrode positioned between the first electrode and a second electrode, wherein the second electrode is coupled to a capacitor;
- and
- means for sensing a voltage of the second electrode.
Dependencies are inferred from the claim text.