Micro-electro-mechanical system (mems) structure and design structures
AssigneeInternational Business Machines Corporation
InventorsWard A. Johnson, Jenifer E. Lary, Anthony K. Stamper, Kimball M. Watson, Pui L. Yee
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Abstract
Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and usage, and design structures are disclosed herein. The method includes applying a first voltage polarity to an actuator of a Micro-Electro-Mechanical System (MEMS) structure to place the MEMS structure in a predetermined state for a first operating condition. The method further includes applying a second voltage polarity which is opposite from the first voltage polarity to the actuator of the MEMS structure during a subsequent operating condition.
Claims20
A method, comprising:
- applying a first voltage polarity to an actuator of a Micro-Electro-Mechanical System (MEMS) structure to place the MEMS structure in a predetermined state for a first operating condition;
- and
- applying a second voltage polarity which is opposite from the first voltage polarity to the actuator of the MEMS structure during a subsequent operating condition.
A method comprising:
- applying a first voltage polarity to a Micro-Electro-Mechanical System (MEMS) structure;
- applying a second voltage polarity to a MEMS beam during an OFF state or a subsequent actuated state of the MEMS structure, wherein:
- the first voltage polarity is opposite to the second voltage polarity;
- the first voltage polarity places the MEMS structure in a data transmission mode;
- the second voltage polarity is applied after conclusion of the data transmission mode;
- and
- the second voltage polarity reduces dielectric charging across the MEMS structure.
A method in a computer-aided design system for generating a functional design model of a MEMS structure, the method comprising:
- generating a functional representation of a MEMS beam moveable between an ON state and an OFF state, the MEMS beam comprising a first set of actuators and a capacitor plate within a dielectric material;
- and
- generating a functional representation of a second set of actuators and another capacitor plate, which are separated from the first set of actuators and the capacitor plate by an insulator layer,
- wherein the representations further comprise at least one of the first set of actuators and the second set of actuators being structured and configured to provide a change in polarity of a first voltage in an ON state and an a second voltage after the MEMS structure is in a subsequent OFF state.
Dependencies are inferred from the claim text.