Semiconductor device, manufacturing method thereof, and measuring method thereof
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsTakuya TSURUME, Etsuko ASANO
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AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsTakuya TSURUME, Etsuko ASANO
Estimating the term…
To provide a semiconductor device capable of being easily subjected to a physical test without deteriorating characteristics. According to a measuring method of a semiconductor device in which an element layer provided with a test element including a terminal portion is sealed with first and second films having flexibility, the first film formed over the terminal portion is removed to form a contact hole reaching the terminal portion; the contact hole is filled with a resin containing a conductive material; heating is carried out after arranging a wiring substrate having flexibility over the resin with which filling has been performed so that the terminal portion and the wiring substrate having flexibility are electrically connected via the resin containing a conductive material; and a measurement is performed.
A measuring method of a semiconductor device in which an element layer provided with a test element including a terminal portion is sealed with a first film having flexibility and a second film having flexibility, comprising the steps of:
Dependencies are inferred from the claim text.