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US 2014/0368210 A1Published application
Cold cathode ionization vacuum gauge and inner wall protection member
AssigneeCanon Anelva Corporation
InventorsITARU ENOMOTO, HIDEO MANO
Life of this patent
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Abstract
A cold cathode ionization vacuum gauge, including: two electrodes disposed such that one of the electrodes is surrounded by the other electrode to thereby form a discharge space therebetween; and an electrode protection member disposed in the discharge space and configured to protect an inner wall surface of the other electrode, wherein the electrode protection member has electric conductivity and is elastically deformed along a shape of the inner wall surface to be electrically connected to the other electrode.
Claims8
A cold cathode ionization vacuum gauge, comprising:
- two electrodes disposed such that one of the electrodes is surrounded by the other electrode to thereby form a discharge space therebetween;
- and
- an electrode protection member disposed in the discharge space and configured to protect an inner wall surface of the other electrode, wherein
- the electrode protection member has electric conductivity and is elastically deformed along a shape of the inner wall surface to be electrically connected to the other electrode.
1 more element
An electrode protection member, wherein
- the electrode protection member has electric conductivity and is disposed in a discharge space between two electrodes, the two electrodes being disposed such that one of the electrodes is surrounded by the other electrode to thereby form the discharge space,
- the electrode protection member is configured to protect an inner wall surface of the other electrode, and
- the electrode protection member is elastically deformed along a shape of the inner wall surface to be electrically connected to the other electrode when disposed in the discharge space.
Dependencies are inferred from the claim text.