Internal electrode for piezoelectric device, piezoelectric device including the same, and method for manufacturing piezoelectric device

A piezoelectric device, comprising:

• a multilayered body in which a piezoelectric layer having a first internal electrode formed thereon and a piezoelectric layer having a second internal electrode formed thereon are alternately formed;
• a first insulating via formed in the first internal electrode layer;
• a second insulating via formed in the second internal electrode layer;
• a first conductive via formed in the multilayered body and penetrating through the first insulating via;
• and
• a second conductive via formed in the multilayered body and penetrating through the second insulating via,
• wherein a diameter of the first insulating via is larger than a diameter of the first conductive via, and a diameter of the second insulating via is larger than a diameter of the second conductive via.

A method of manufacturing a piezoelectric device, comprising:

• preparing a plurality of piezoelectric layers;
• printing a first internal electrode layer having a first insulating via formed therein on some of the piezoelectric layers, and printing a second internal electrode layer having a second insulating via formed therein on the other of the piezoelectric layers;
• preparing a multilayered body by alternately stacking the piezoelectric layer on which the first internal electrode is printed and the piezoelectric layer on which the second internal electrode is printed;
• pressing and firing the multilayered body;
• and
• forming a first conductive via in the multilayered body such that it penetrates through the first insulating via, and forming a second conductive via in the multilayered body such that it penetrates through the second insulating via,
• wherein a diameter of the first insulating via is larger than a diameter of the first conductive via, and a diameter of the second insulating via is larger than a diameter of the second conductive via.