US 2014/0368088 A1Published application

Piezoelectric device and electronic apparatus

AssigneeSony Corporation

InventorsKazuo TAKAHASHI, Satoshi MITANI, Hidetoshi KABASAWA

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Abstract

A piezoelectric device includes a vibrator, a piezoelectric drive unit, and a first piezoelectric detector. The vibrator includes a first surface, a first groove formed along a first axis direction, and a second groove formed to be parallel to the first groove. The piezoelectric drive unit includes a first electrode pair provided in the first groove and opposed to each other in a second axis direction orthogonal to the first axis direction and parallel to the first surface, and a first piezoelectric body provided between the first electrode pair, and is capable of vibrating the vibrator. The first piezoelectric detector includes a second electrode pair provided in the second groove and opposed to each other in the second axis direction, and a second piezoelectric body provided between the second electrode pair, and is capable of detecting a vibration of the vibrator.

Claims13

Dependent claims

A piezoelectric device, comprising:

a vibrator including
a first surface,
a first groove that is formed along a first axis direction in the first surface, and
a second groove that is formed in the first surface to be parallel to the first groove;
a piezoelectric drive unit including
a first electrode pair that are provided in the first groove and opposed to each other in a second axis direction that is orthogonal to the first axis direction and parallel to the first surface, and
a first piezoelectric body that is provided between the first electrode pair, the piezoelectric drive unit being configured to be capable of vibrating the vibrator in a plane parallel to the first surface due to voltage application between the first electrode pair;
and
a first piezoelectric detector including
a second electrode pair that are provided in the second groove and opposed to each other in the second axis direction, and
a second piezoelectric body that is provided between the second electrode pair, the first piezoelectric detector being configured to be capable of detecting a vibration of the vibrator in the plane parallel to the first surface.

8 more elements

Dependencies are inferred from the claim text.

Facts

Application: 14/293,630Filed 2 Jun 2014
Priority: JP 2013-12335512 Jun 2013
Published: 18 Dec 2014
Term ends: Not estimatedThe source records don’t support an estimate.

Classification7 codes

H03H 9/21
Constructional features of resonators consisting of piezoelectric or electrostrictive material: crystal tuning forks
G01C 19/5607
Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces: using vibrating tuning forks
H03H 9/02259
Of microelectro-mechanical resonators: driving or detection means
H03H 9/2484
Single-Ended Tuning Fork resonators: with two fork tines, e.g. Y-beam cantilever