# US 2014/0360267 A1 · Thermal convection type linear accelerometer > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2014/0360267 A1 - Document ID: US20140360267A1 - Status: Published application - Kind: A1 - Application number: 14/301,648 - Filed: 2014-06-11 - Published: 2014-12-11 - Earliest claimed: 2013-06-11 - Assignees: Chung Hua University - Applicants: Chung Hua University - Inventors: JIUM MING LIN - Web page: https://patentgrep.com/patent/US20140360267A1 ## CPC - G01P 15/008: {by using thermal pick-up} - G01P: MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT (measuring or recording blood flow A61B5/02, A61B8/06; monitoring speed or deceleration of electrically-propelled vehicles B60L3/00; vehicle lighting systems adapted to indicate speed B60Q1/54; determining position or course in navigation, measuring ground distance in geodesy or surveying G01C; combined measuring devices for measuring two or more variables of movement G01C23/00; measuring velocity of sound G01H; measuring velocity of light G01J7/00; measuring direction or velocity of solid objects by reception or emission of radiowaves or other waves and based on propagation effects, e.g. Doppler effect, propagation time, direction of propagation, G01S; measuring speed of nuclear radiation G01T; measuring acceleration of gravity G01V; {measuring or recording the speed of trains B61L23/00; speed indicators incorporated in motor vehicles B60K35/00; measuring frequency or phase G01R; traffic control G08G}) ## Abstract A thermal convection type linear accelerometer includes a substrate and a first sensing device. The first sensing device includes two first temperature-sensing components and a first heater. The two first temperature-sensing components are disposed on the substrate. The first heater is disposed on the substrate. The first heater is located between the two first temperature-sensing components. The two first temperature-sensing components are higher than the first heater relative to the substrate. ## Claims ### Claim 1 A thermal convection type linear accelerometer comprising: a substrate; and a first sensing device comprising: two first temperature-sensing components disposed on the substrate; and a first heater disposed on the substrate and between the two first temperature-sensing components, wherein a height of at least one of the two first temperature-sensing components relative to the substrate is greater than a height of the first heater relative to the substrate. ### Claim 2 (depends on 1) The thermal convection type linear accelerometer of claim 1, wherein the height of at least one of the two first temperature-sensing components relative to the substrate is between 0.5 and 2 millimeters. ### Claim 3 (depends on 1) The thermal convection type linear accelerometer of claim 1, wherein the substrate comprises a surface, and the whole first heater and the whole two first temperature-sensing components are on the surface. ### Claim 4 (depends on 1) The thermal convection type linear accelerometer of claim 1, further comprising a second sensing device, which comprises: two second temperature-sensing components disposed on the substrate; and a second heater disposed on the substrate and between the two second temperature-sensing components, wherein a height of the two second temperature-sensing components relative to the substrate is greater than that of the second heater relative to the substrate; wherein the first sensing device and the second sensing device are configured to measure linear accelerations in different directions. ### Claim 5 (depends on 4) The thermal convection type linear accelerometer of claim 4, wherein the height of the two second temperature-sensing components is between 0.5 and 2 millimeters. ### Claim 6 (depends on 5) The thermal convection type linear accelerometer of claim 5, wherein the substrate comprises a surface, and the whole second heater and the whole second temperature-sensing components are on the surface. ### Claim 7 (depends on 6) The thermal convection type linear accelerometer of claim 6, further comprising a third sensing device, which comprises: two third temperature-sensing components; and a third heater disposed between the two third temperature-sensing components, wherein the two third temperature-sensing components and the third heater are arranged in a direction perpendicular to the substrate. ### Claim 8 (depends on 7) The thermal convection type linear accelerometer of claim 7, further comprises an additional substrate, on which the two third temperature-sensing components and the third heater are disposed, wherein a height of the two third temperature-sensing components relative to the substrate is greater than that of the third heater relative to the substrate. ### Claim 9 (depends on 8) The thermal convection type linear accelerometer of claim 8, further comprises a plurality of support elements, wherein each support element is disposed between the first temperature-sensing component and the substrate, the second temperature-sensing component and the substrate, or the third temperature-sensing component and the substrate, wherein each support element includes a thickness between 0.5 and 2 millimeters. ### Claim 10 (depends on 9) The thermal convection type linear accelerometer of claim 9, wherein each support element comprises aluminum nitride. ### Claim 11 (depends on 10) The thermal convection type linear accelerometer of claim 10, further comprising a connector disposed on the substrate, wherein the additional substrate is inserted into the connector. ### Claim 12 (depends on 11) The thermal convection type linear accelerometer of claim 11, wherein each of the first, second, and third heaters comprises chromium of between 12% and 19% and nickel of between 81% and 88%. ### Claim 13 (depends on 12) The thermal convection type linear accelerometer of claim 12, comprising a radio frequency identification tag device connecting to the first, second, and third sensing devices. ### Claim 14 (depends on 13) The thermal convection type linear accelerometer of claim 13, wherein the first, second, and third temperature-sensing components comprises p-type amorphous silicon. ### Claim 15 (depends on 13) The thermal convection type linear accelerometer of claim 13, wherein the first, second, and third temperature-sensing components comprises an E, K, T, or J type thermopile. ### Claim 16 (depends on 1) The thermal convection type linear accelerometer of claim 1, wherein the height of the at least one of the two first temperature-sensing components is greater than a thickness of the first heater.