Robot arm control apparatus, substrate transfer apparatus, substrate processing apparatus, robot arm control method, and program

A substrate transfer apparatus comprising:

• a robot arm device configured to transfer a substrate, the robot arm device having at least two arm portions and at least two rotational joints configured to rotate the at least two arm portions, respectively;
• and
• a robot arm control apparatus including a control unit configured to control rotation of the at least two rotational joints to move generally rectilinearly a distal end of a predetermined arm portion of the at least two arm portions except a most proximal arm portion thereof, the control unit controlling the rotation of the at least two rotational joints so that a motion acceleration of the distal end of the predetermined arm portion when the distal end is moved generally rectilinearly results in coincidence with a predetermined temporal transition,
• wherein the motion acceleration with the predetermined temporal transition is such that, when the motion acceleration is expressed as a function of time, a derivative obtained by differentiating the function with respect to the time shows a continuous transition with respect to changes in the time.