Dielectric reliability assessment for advanced semiconductors

A computer program product for performing a dielectric reliability assessment for an advanced semiconductor, the computer program product comprising:

• a tangible storage medium readable by a processing circuit and storing instructions for execution by the processing circuit for performing a method comprising:
• receiving data associated with a test of a macro of the advanced semiconductor to a point of dielectric breakdown;
• scaling the data for the macro down to a reference area;
• extracting a parameter for a Weibull distribution from the scaled down data for the reference area;
• deriving a cluster factor (α) from the scaled down data for the reference area;
• and
• projecting a failure rate for a larger area of the advanced semiconductor based on the extracted parameter, the cluster factor and the recorded data associated with the dielectric breakdown of the macro.

A computer system for performing a dielectric reliability assessment for an advanced semiconductor, the system comprising:

• a processor configured to communicate with a memory and one or more auxiliary storage devices, the processor configured to perform a method comprising:
• receiving data associated with a test of a macro of the advanced semiconductor to a point of dielectric breakdown;
• scaling the data for the macro down to a reference area;
• extracting a parameter for a Weibull distribution from the scaled down data for the reference area;
• deriving a cluster factor (α) from the scaled down data for the reference area;
• and
• projecting a failure rate for a larger area of the advanced semiconductor based on the extracted parameter, the cluster factor and the recorded data associated with the dielectric breakdown of the macro.