Substrate transfer robot, substrate transfer system, and method for transferring substrate

A substrate transfer system comprising:

• a robot installment area;
• and
• a substrate transfer robot in the robot installment area, the substrate transfer robot comprising:
• a hand configured to approach a substrate storage on which a substrate is placed, and configured to hold the substrate;
• and
• an arm configured to move the hand, the substrate transfer robot being configured to move the hand such that when in plan view, a substrate holding center at a time when the hand is holding the substrate is adjacent to the substrate storage and is at an access start position that is at a predetermined distance from the substrate storage, the substrate holding center reaches a substrate placement position in the substrate storage with a hand center line inclined toward an access straight line and with the hand holding center overlapping the access straight line, the hand center line being oriented from a base of the hand to a distal end of the hand, the access straight line being perpendicular to a front surface of the substrate storage and being associated with the hand approaching the substrate storage.

A substrate transfer robot comprising:

• a hand;
• and
• an arm coupled to the hand at a distal end of the arm,
• wherein at an access start position, a position and an orientation of the hand at a time when the hand is approaching a substrate storage on which the substrate is placed are such that the hand is inclined toward an access straight line that is perpendicular to a front surface of the substrate storage, and
• wherein at a substrate placement position in the substrate storage, the position and the orientation of the hand at the time when the hand is approaching the substrate storage are set along the access straight line.