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US 2014/0349468 A1Published application
Trench filling method and processing apparatus
AssigneeTokyo Electron Limited
InventorsDaisuke SUZUKI, Kazuya TAKAHASHI, Mitsuhiro OKADA, Katsuhiko KOMORI, Satoshi ONODERA
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Abstract
The present disclosure provides a method for filling a trench formed on an insulating film of a workpiece. The method includes forming a first impurity-containing amorphous silicon film on a wall surface which defines the trench, forming a second amorphous silicon film on the first amorphous silicon film, and annealing the workpiece after the second amorphous silicon film is formed.
Claims8
A method for filling a trench formed on an insulating film of a workpiece, the method comprising:
- forming a first impurity-containing amorphous silicon film on a wall surface which defines the trench;
- forming a second amorphous silicon film on the first amorphous silicon film;
- and
- annealing the workpiece after the second amorphous silicon film is formed.
1 more element
A processing apparatus, comprising:
- a vessel;
- a gas supply unit configured to supply a first gas for forming a first impurity-containing amorphous silicon film and a second gas for forming a second amorphous silicon film, into the vessel;
- a heating unit configured to heat an internal space of the vessel;
- and
- a control unit configured to control the gas supply unit and the heating unit,
- wherein the control unit is further configured to perform a first control operation by which the gas supply unit is controlled so as to supply the first gas into the vessel and by which the heating unit is controlled so as to heat the internal space of the vessel,
- wherein the control unit is further configured to, after performing the first control operation, perform a second control operation by which the gas supply unit is controlled so as to supply the second gas into the vessel and by which the heating unit is controlled so as to heat the internal space of the vessel, and
- wherein the control unit is further configured to, after performing the second control operation, perform a third control operation by which the heating unit is controlled so as to heat the internal space of the vessel.
5 more elements
Dependencies are inferred from the claim text.