Method for producing thin semiconductor components

A method for producing thin semiconductor devices, comprising:

• providing a semiconductor substrate with a structure featuring a terminal pad on an upper side of the semiconductor substrate,
• providing an additional substrate for handling the semiconductor substrate, the additional substrate being structured on an upper side to a maximum depth and in at least partial correspondence with the structure of the semiconductor substrate, without penetrating the additional substrate, the upper side of the additional substrate being flat in a region of the terminal pad,
• the upper sides of the semiconductor substrate and the additional substrate being permanently connected to one another,
• the semiconductor substrate being thinned from a rear side facing away from the upper side,
• a contact hole to the terminal pad being produced from the rear side after the thinning of the semiconductor substrate, and a through-substrate via being produced in the contact hole and connected to the terminal pad without filling the contact hole, and
• the additional substrate being removed at least to such a degree that the structure is exposed, a remaining portion of the additional substrate being maintained on the side of the terminal pad that faces away from the through-substrate via and mechanically stabilizing the terminal pad.