Electronic device, method of manufacturing the same, and camera
AssigneeCanon Kabushiki Kaisha
InventorsMasahiko Kondo, Masaki Kurihara
Life of this patent
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AssigneeCanon Kabushiki Kaisha
InventorsMasahiko Kondo, Masaki Kurihara
Estimating the term…
A method of manufacturing an electronic device includes forming a structure including a member, and a first film arranged on at least a surface of the member, the member including an insulating film, a passivation film arranged on the insulating film and having an upper surface, and a trench positioned from the passivation film to the insulating film; forming a second film to cover the first film; and patterning the second film by a photolithography process using a photomask. In the forming the second film, an alignment mark including a concave portion corresponding to the trench is formed in a region above the trench in the second film. In the patterning the second film, the photomask is aligned with the structure by using the alignment mark.
A method of manufacturing an electronic device, comprising:
A method of manufacturing an electronic device, comprising:
A method of manufacturing an electronic device, comprising:
Dependencies are inferred from the claim text.