Device and method for depositing organic material
AssigneeSamsung Display Co., Ltd.
InventorsSeung-Ho Choi, Hyun Choi, Sung-Gon Kim, Min-Gyu Seo
Life of this patent
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Abstract
A device for depositing an organic material includes a substrate; a mask having an opening portion and a shield portion; a fixing member for fixing the substrate and the mask to each other; a deposition source comprising a plurality of nozzles arranged in a first direction and configured to spray the organic material; and a plurality of shield plates near the plurality of nozzles on the deposition source. An angle θ between the substrate and a line extended from a distal end of one of the nozzles to a center of a distal end of a corresponding one of the shield plates is greater than or equal to a taper angle Φ of the shield portion of the mask.
Claims7
A method for depositing an organic material on a substrate, the method comprising:
- fixing a substrate and a mask having an opening portion and a shield portion to a fixing member;
- providing a deposition source having a plurality of nozzles arranged in a first direction;
- forming a plurality of shield plates near the plurality of nozzles of the deposition source;
- and
- spraying an organic material through the plurality of nozzles while moving the deposition source in a second direction crossing the first direction,
- wherein an angle θ between the substrate and a line extended from a distal end of one of the nozzles to a center of a distal end of a corresponding one of the shield plates is greater than or equal to a taper angle Φ of the shield portion of the mask.
Dependencies are inferred from the claim text.