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US 2014/0349432 A1Published application
Method for manufacturing organic electroluminescent element
AssigneePanasonic Corporation
InventorsMasaki Aonuma, Takuya Satoh, Akira Takiguchi, Yoichiro Yashiro
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Abstract
Forming an upper electrode included in an organic electroluminescent element includes: forming a first film made of a material for the upper electrode on an organic functional layer by magnetron sputtering under a first condition; and forming a second film made of the material for the upper electrode on the first film by magnetron sputtering under a second condition different from the first condition, the second film having a lower film stress than the first film.
Claims6
A method for manufacturing an organic electroluminescent element that includes:
- an electrode pair composed of an upper electrode and a lower electrode;
- and an organic functional layer disposed between the upper electrode and the lower electrode, the method comprising
- forming the upper electrode on the organic functional layer by magnetron sputtering, wherein
- forming the upper electrode includes:
- forming a first thin film made of a material for the upper electrode on the organic functional layer under a first condition;
- and
- forming a second thin film made of the material for the upper electrode on the first thin film under a second condition different from the first condition, the second thin film having a lower film stress than the first thin film.
4 more elements
Dependencies are inferred from the claim text.