Deposition apparatus, method thereof and method for forming quantum-dot layer using the same

A method for deposition, the method comprising:

• supplying a first deposition material to a first deposition source;
• supplying a second deposition material which is different from the first deposition material to a second deposition source;
• disposing a substrate opposite a first nozzle coupled to the first deposition source and a second nozzle coupled to the second deposition source;
• transporting the substrate in a first direction in which the first nozzle is disposed to place the substrate above the first nozzle;
• depositing the first deposition material on the substrate through the first nozzle, wherein the first deposition material is stored in the first deposition source;
• transporting the substrate in a second direction in which the second nozzle is disposed to place the substrate above the second nozzle;
• and
• depositing the second deposition material on the substrate through the second nozzle, wherein the second deposition material is stored in the second deposition source.

A method for forming a quantum dot layer, the method comprising:

• depositing a first deposition material on a substrate;
• depositing a second deposition material on the deposited first deposition material at a thinner thickness than a thickness of the deposited first deposition material;
• depositing the first deposition material on the second deposition material at a same thickness as the thickness of the deposited first deposition material to isolate the second deposition material from outside;
• and
• agglomerating the second deposition material which is disposed between the two deposited first deposition materials to form a quantum dot layer.

A method for forming a display device, comprising:

• forming a first electrode on a first substrate;
• forming a hole injection layer on the first electrode;
• forming a light emitting layer having a multi-layer quantum dot structure including a plurality of quantum dots disposed between organic materials on the hole injection layer,
• wherein the forming of the light emitting layer comprises:
• depositing a first deposition material on the hole injection layer to form a first organic layer on the hole injection layer by thermal evaporation,
• depositing a second deposition material on the first organic layer to form an inorganic layer on the first organic layer having a thinner thickness than a thickness of the first organic layer by thermal evaporation,
• depositing the first deposition material on the inorganic layer to form a second organic layer on the inorganic layer having a same thickness as the thickness of the first organic layer by thermal evaporation, and
• agglomerating materials of the inorganic layer which is disposed between the first and second organic layers to form a quantum dot layer between the first and second organic layers;
• and
• providing a stacked structure including an electron transport layer, a second electrode and a second substrate sequentially stacked on the light emitting layer.