Substrate moving unit for deposition, deposition apparatus including the same, method of manufacturing organic light-emitting display apparatus by using the deposition apparatus, and organic light-emitting display apparatus manufactured by using the method

A method of manufacturing an organic light-emitting display apparatus, the method comprising:

• conveying a moving unit into a chamber by using a first conveying unit while a substrate is fixed on a first surface of an electrostatic chuck of the moving unit;
• forming a layer by depositing a deposition material ejected from a deposition assembly on the substrate while the substrate is spaced apart from the deposition assembly in the chamber and being moved with respect to the deposition assembly by the first conveying unit;
• and
• returning the moving unit separated from the substrate by using a second conveying unit,
• wherein the deposition assembly includes:
• a deposition source configured to hold a deposition material;
• a deposition source nozzle that is configured to eject the deposition material toward the first conveying unit from the deposition source;
• and
• a patterning slit sheet between the deposition source nozzle and the moving unit, the patterning slit sheet including a plurality of patterning slits, and
• wherein the forming of a layer comprises using a magnetic force applying unit to apply a magnetic force-induced attractive force to the patterning slit sheet to prevent the patterning slit sheet from bending away from the first conveying unit, wherein the magnetic force applying unit is disposed across the electrostatic chuck from the first surface.