Drawing apparatus, and method of manufacturing article
AssigneeCanon Kabushiki Kaisha
InventorKeisuke NAKAMURA
Life of this patent
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Abstract
The present invention provides a drawing apparatus for performing drawing on a substrate with a plurality of charged particle beams, the apparatus including an aperture array member in which a plurality of first apertures, for generating the plurality of charged particle beams, is formed, and a generating device configured to individually generate electric potentials in a plurality of regions of the aperture array member, wherein each of the plurality of regions corresponds to at least one of the plurality of first apertures.
Claims9
A drawing apparatus for performing drawing on a substrate with a plurality of charged particle beams, the apparatus comprising:
- an aperture array member in which a plurality of first apertures, for generating the plurality of charged particle beams, is formed;
- and
- a generating device configured to individually generate electric potentials in a plurality of regions of the aperture array member,
- wherein each of the plurality of regions corresponds to at least one of the plurality of first apertures.
A method of manufacturing an article, the method comprising steps of:
- performing drawing on a substrate using a drawing apparatus;
- developing the substrate on which the drawing has been performed;
- and
- processing the developed substrate to manufacture the article,
- wherein the drawing apparatus performs drawing on the substrate with a plurality of charged particle beams, and includes:
- an aperture array member in which a plurality of first apertures, for generating the plurality of charged particle beams, is formed;
- and
- a generating device configured to individually generate electric potentials in a plurality of regions of the aperture array member,
- wherein each of the plurality of regions corresponds to at least one of the plurality of first apertures.
Dependencies are inferred from the claim text.