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US 2014/0349140 A1Published application
Cxnyhz film, deposition method, magnetic recording medium and method for manufacturing the same
AssigneeYoutec Co., Ltd.
InventorsHaruhito Hayakawa, Kouji Abe, Keiichi Terashima, Yuuji Honda
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Abstract
To provide a CxNyHz film of high density and a deposition method. One aspect of the present invention is a CxNyHz film formed on a substrate to be deposited, wherein x, y and z satisfy formulae (1) to (4) below: 0.4<x<0.7 (1) 0.01<y<0.5 (2) 0≦z<0.3 (3) x+y+z=1. (4)
Claims16
A CxNyHz film deposited on a substrate to be deposited,
- wherein x, y and z satisfy formulae (1) to (4) below:
- 0.4<x<0.7 (1)
- 0.01<y<0.5 (2)
- 0≦z<0.3 (3)
- x+y+z=1. (4)
2 more elements
Dependencies are inferred from the claim text.