Pressing apparatus, substrate bonding apparatus and stacked substrate

A pressing apparatus for pressing a plurality of substrates stacked on one another, comprising:

• a first stage that supports the plurality of substrates;
• a second stage that can sandwich the plurality of substrates between the first stage and the second stage;
• a driving section that moves the first stage towards the second stage so as to sandwich the plurality of substrates;
• a pressing section that, when the driving section has made the first stage reach a predetermined position, applies a pressing force to the first stage to press the plurality of substrates between the first stage and the second stage;
• and
• a control section that controls driving of the driving section, wherein
• the control section controls a pressing force exerted on the first stage from the driving section, so that a pressure distribution of at least one of the first stage and the second stage is a predetermined distribution at the time of pressing by the pressing section.

A pressing apparatus for pressing a plurality of substrates stacked on one another, comprising:

• a movable section that includes a first stage supporting the plurality of substrates;
• a second stage that can sandwich the plurality of substrates between the first stage and the second stage;
• a driving section that moves the first stage towards the second stage so as to sandwich the plurality of substrates;
• a pressing section that, when the driving section has made the first stage reach a predetermined position, applies a pressing force to the first stage to press the plurality of substrates between the first stage and the second stage;
• and
• a pressing member linked to the first stage and pressing the first stage by a pressing force received from the driving section, wherein
• the pressing member presses the center of mass of the movable section.

A pressing apparatus comprising:

• a fixed section;
• a movable section capable of being moved back and forth with respect to the fixed section, a space to which a fluid flows in and out being formed between the movable section and the fixed section;
• and
• a tilt restraining section that restrains a tilt of the movable section due to entry of the fluid.