Com/iphone method of making superoleophobic re-entrant resist structures
AssigneeXerox Corporation
InventorsYuanjia Zhang, Kyoo-Chul Park, Hong Zhao, Kock-Yee Law
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Abstract
A device and method for preparing a device having a superoleophobic surface are disclosed. The method includes providing a substrate; coating a lift-off resist layer on the substrate; baking the lift-off resist layer; layering a photoresist layer on the lift-off resist layer; performing photolithography to create a textured pattern in the photoresist layer and the lift-off resist layer, and chemically modifying the textured pattern to create a superoleophobic surface.
Claims20
A front face for an ink jet printhead, the front face comprising:
- a flexible substrate, wherein the flexible substrate comprises
- a plastic film;
- a lift-off resist layer;
- a photoresist layer,
- wherein the lift-off resist layer and the photoresist layer form a textured pattern,
- wherein the textured pattern comprises at least one overhang re-entrant structure;
- and
- a conformal fluoropolymer or fluorosilane coating disposed on a surface of the textured pattern.
A front face for an ink jet printhead, the front face comprising:
- a flexible substrate, wherein the flexible substrate comprises
- a plastic film;
- a lift-off resist layer;
- a photoresist layer,
- wherein the lift-off resist layer and the photoresist layer form a textured pattern,
- wherein the textured pattern comprises at least one overhang re-entrant structure;
- and
- a conformal fluoropolymer or fluorosilane coating disposed on a surface of the textured pattern, wherein a hydrocarbon-based ink forms a contact-angle with a surface of the conformal coating disposed on the surface of the textured pattern that is greater than about 150°.
A flexible device comprising a flexible substrate having a superoleophobic surface, wherein the flexible substrate comprises
- a plastic film;
- a lift-off resist layer;
- a photoresist layer,
- wherein the lift-off resist layer and the photoresist layer form a textured pattern,
- wherein the textured pattern comprises at least one overhang re-entrant structure;
- and
- a conformal fluoropolymer or fluorosilane coating disposed on a surface of the textured pattern, wherein the conformal coating disposed on the surface of the textured pattern comprises a superoleophobic surface.
Dependencies are inferred from the claim text.