Copper film-forming composition, and method for producing copper film by using the composition
AssigneeAdeka Corporation
InventorTetsuji ABE
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Abstract
Provided is a copper film-forming composition, which is in the form of a solution and can obtain a copper film having sufficient electrical conductivity when heated at a relatively low temperature. This copper film-forming composition contains 0.01 to 3.0 mol/kg of copper formate or its hydrate, 0.01 to 3.0 mol/kg of copper acetate or its hydrate, at least one diol compound selected from a group of diols of formula (1) and diols of formula (1′), a piperidine compound of formula (2), and an organic solvent. When a content of the copper formate or its hydrate is assumed to be 1 mol/kg, the diol compound is contained in a range of 0.1 to 6.0 mol/kg and the piperidine compound is contained in a range of 0.1 to 6.0 mol/kg.
Claims8
A copper film-forming composition comprising, as essential components, 0.01 to 3.0 mol/kg of copper formate or a hydrate thereof, 0.01 to 3.0 mol/kg of copper acetate or a hydrate thereof, at least one diol compound selected from the group consisting of diol compounds represented by the below-described formula (1) and diol compounds represented by the below-described formula (1′), a piperidine compound represented by the below-described formula (2), and an organic solvent with the copper formate or the hydrate thereof, the copper acetate or the hydrate thereof, the at least one diol compound and the piperidine compound dissolved therein,
- wherein, when a content of the copper formate or the hydrate thereof is assumed to be 1 mol/kg, the diol compound is contained in a range of 0.1 to 6.0 mol/kg and the piperidine compound is contained in a range of 0.1 to 6.0 mol/kg:
- wherein X denotes a hydrogen atom, methyl group, ethyl group or 3-aminopropyl group, and R1 and R2 each independently indicate a hydrogen atom or an alkyl group having 1 to 4 carbon atoms or may be fused together to form a 5-membered ring or 6-membered ring in combination with the adjacent nitrogen atom, and
- wherein R represents a methyl group or ethyl group, and m stands for 0 or 1.
Dependencies are inferred from the claim text.