High temperature furnace insulation
OwnerNing Duanmu, Dean C. Skelton +2inventors
InventorsNing Duanmu, Dean C. Skelton, Menahem Lowy, Dzung D. Nguyen
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Abstract
A high temperature furnace comprising hot zone insulation having at least one shaped thermocouple assembly port to reduce temperature measurement variability is disclosed. The shaped thermocouple assembly port has an opening in the insulation facing the hot zone that is larger than the opening on the furnace shell side of the insulation. A method for producing a crystalline ingot in a high temperature furnace utilizing insulation having a shaped thermocouple assembly port is also disclosed.
Claims27
A furnace comprising:
- a furnace shell;
- a hot zone within the furnace shell, the hot zone comprising at least one heating element in the hot zone;
- insulation surrounding the hot zone having a furnace shell side facing the furnace shell and a heating element side facing the heating element;
- and
- at least one thermocouple assembly inserted through at least one thermocouple assembly port in the insulation, wherein the thermocouple assembly port increases in size from the furnace shell side of the insulation to the heating element side of the insulation.
Insulation surrounding a hot zone of a furnace, wherein:
- the insulation has a furnace shell side and a heating element side and comprises at least one thermocouple assembly port through the insulation to insert a thermocouple assembly and wherein the thermocouple assembly port is countersunk or counterbored on the heating element side of the insulation.
27-28. (canceled)
Dependencies are inferred from the claim text.