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US 2014/0338451 A1Published application
Sensor element, electronic apparatus and moving object
AssigneeSeiko Epson Corporation
InventorShigekazu TAKAGI
Life of this patent
Estimating the term…
Abstract
A sensor element includes: a detection electrode section; a movable body that is provided to face the detection electrode section; and a protruding section that is provided in a region where the detection electrode section is provided in a plan view of the detection electrode section seen in a vertical direction and protrudes toward the movable body. At least a part of a surface of the protruding section is made of an insulating material.
Claims18
A sensor element comprising:
- a detection electrode section;
- a movable body that is provided to face the detection electrode section;
- and
- a protruding section that is provided in a region where the detection electrode section is provided in a plan view of the detection electrode section seen in a vertical direction, and protrudes toward the movable body,
- wherein at least a part of a surface of the protruding section includes an insulating material.
2 more elements
A sensor element comprising:
- a detection electrode section;
- a movable body that is provided to face the detection electrode section;
- and
- a protruding section that protrudes toward the movable body,
- wherein the detection electrode section includes a first detection electrode section and a second detection electrode section that are disposed at positions that face the movable body, and
- wherein the protruding section is provided between the first detection electrode section and the second detection electrode section in a plan view of the detection electrode section seen in a vertical direction.
3 more elements
Dependencies are inferred from the claim text.