Acceleration sensor
AssigneeRobert Bosch GmbH
InventorJohannes Classen
Life of this patent
Estimating the term…
Abstract
An acceleration sensor having a substrate and a seismic mass; the acceleration sensor has a main extension plane and includes a spring device, via which the substrate and the seismic mass are connected, such that in an acceleration in a detection direction that runs perpendicular to the main extension plane, the seismic mass is deflectable in the sense of a tilting motion about an axis of rotation running parallel to the main extension plane, the seismic mass furthermore being connected to the substrate via at least one first spring, the stiffness of the first spring in a deflection of the seismic mass in the sense of the tilting motion being lower in the detection direction than the stiffness of the first spring in a deflection in a primary direction extending parallel to the main extension plane.
Claims7
An acceleration sensor, comprising:
- an acceleration sensor arrangement, including:
- a substrate;
- a seismic mass, wherein the acceleration sensor arrangement includes a main extension plane;
- and
- a spring device, via which the substrate and the seismic mass are connected, such that in an acceleration in a detection direction that runs perpendicular to the main extension plane, the seismic mass is deflectable in the sense of a tilting motion about an axis of rotation that runs parallel to the main extension plane, wherein the seismic mass is further connected to the substrate via at least one first spring, the stiffness of the first spring in a deflection of the seismic mass in the sense of the tilting motion in the detection direction being lower than the stiffness of the first spring in a deflection in a primary direction that runs parallel to the main extension plane.
Dependencies are inferred from the claim text.