Physical quantity sensor and method of manufacturing physical quantity sensor
AssigneeFuji Electric Co., Ltd.
InventorKimihiro ASHINO
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AssigneeFuji Electric Co., Ltd.
InventorKimihiro ASHINO
Estimating the term…
A pressure sensor includes a socket portion and a nut portion which are integrally molded with resin, a screw portion which is tightly fixed to a side wall of an opening in a concave part of the nut portion by adhesive, and a sense element which is fixed to the screw portion and is disposed in the concave part of the nut portion. The socket portion, the nut portion and the screw portion constitute a package. A through hole introducing the pressure measurement target liquid is formed in the screw portion. An external lead-out terminal is fixed to the sense element. The external lead-out terminal passes through the through hole on a base of the concave part of the nut portion, and is tightly fixed to the socket portion with adhesive. The external lead-out terminal is a connection terminal to be connected with external wiring.
A physical quantity sensor, comprising:
A physical quantity sensor, comprising:
A method of manufacturing a sensor, comprising:
A method of manufacturing a sensor, comprising:
Dependencies are inferred from the claim text.