Interconnection structure made of redirected carbon nanotubes
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorJean Dijon
Life of this patent
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Abstract
The invention relates to an electronic device including electric connections extending along at least two different directions, said connections being essentially formed by means of bundles of carbon nanotubes (CNT) (8), Where at least two CNT bundles comprise a portion (8a) having its axis directed along a first direction and a portion (8b) having its axis redirected along a second direction, the connections between CNT bundles being achieved by overlapping of the portions (8b) of said at least two bundles to form a connection line (4).
Claims12
1-13. (canceled)
A method of creating electric connections extending along at least two directions of an electronic device, the method comprising:
- growing at least two carbon nanotube (CNT) bundles along a first direction in a cavity of an electronic device;
- redirecting a portion of the at least two CNT bundles along a second direction by flowing a liquid;
- and
- forming a connection line by connecting portions of the at least two CNT bundles redirected along the second direction.
Dependencies are inferred from the claim text.