Flourine and HF Resistant Seals for an Ion Source

For use in an ion implanter, a method for sealing an ion source comprising:

• generating ions in a chamber interior having an exit for allowing ions generated inside the chamber interior to exit an arc chamber body;
• supporting a cathode within a cathode opening in spaced relation to chamber walls bounding the chamber interior for injecting ionizing electrons into the chamber interior;
• sealing an outer surface of the arc chamber body for impeding material from exiting the chamber through a an opening in said arc chamber body by providing a ceramic body having a wall that abuts the chamber body and further defining one or more radially inner channels bounded by one or more inner walls spaced from a region occupied by a cathode support;
• wherein said ceramic body comprises Boron Nitride (BN) material.

A seal for impeding gas flow from an arc chamber comprising:

• a ceramic body including
• i) a bounding wall having an outer surface for abutting an arc chamber body along a sealing surface and which bounds a throughpassage extending through the ceramic body for routing electrode energization signals into the arc chamber;
• and
• ii) one or more one or more interior walls that define a cavity in the ceramic body and which communicates with a portion of an arc chamber interior and collects material in the arc chamber interior, wherein said ceramic body comprises Boron Nitride (BN) material.