Simultaneous inorganic mass spectrometer and method of inorganic mass spectrometry
AssigneeSpectro Analytical Instruments GmbH
InventorsDirk ARDELT, Ulrich HEYNEN, Adi A. Scheidemann
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Abstract
An inorganic mass spectrometer capable of measuring a relevant and large or the full mass spectral range simultaneously may include a suitable ion source (e.g., an ICP mass spectrometer with an ICP ion source), an ion transfer region, ion optics to separate ions out of a plasma beam, a Mattauch-Herzog type mass spectrometer with a set of charged particle beam optics to condition the ion beam before an entrance slit, and a solid state multi-channel detector substantially separated from ground potential and separated from the potential of the magnet.
Claims23
A simultaneous mass spectrometer, comprising:
- an ion source,
- a vacuum interface including a skimmer unit and an extractor unit,
- charged particle optics,
- an object slit, wherein the charged particle optics are configured to focus a plasma beam onto the object slit,
- a Mattauch-Herzog style mass spectrometer including an electrostatic sector analyzer following the object slit and configured to separate by energy ions contained in the plasma beam and followed by at least one magnet configured to receive and to separate by mass the ions output from the electrostatic sector analyzer, and
- a multichannel monolithic complementary metal oxide semiconductor (CMOS) strip detector array configured to simultaneously perform detection over a range of multiple masses, the multichannel monolithic CMOS strip detector array including a plurality of pairs of wide and narrow detector strips arranged across a width of the multichannel monolithic CMOS strip detector array and along a length of the multichannel monolithic CMOS strip detector array.
Dependencies are inferred from the claim text.