Estimation method, estimation device, and inspection device for variable resistance element, and nonvolatile memory device

An estimation method for a variable resistance element including (i) a first electrode, (ii) a second electrode, and therebetween (iii) a variable resistance layer in which a local region is formed which has resistive status that reversibly changes according to an electric pulse applied between the first electrode and the second electrode, the estimation method comprising:

• obtaining an estimated amount of a physical parameter regarding structural characteristics of the local region;
• and
• judging whether the variable resistance element is non-defective or defective based on whether or not the obtained estimated amount of the physical parameter satisfies a predetermined condition.

An estimation device which performs estimation of a variable resistance element including (i) a first electrode, (ii) a second electrode, and therebetween (iii) a variable resistance layer in which a local region is formed which has resistive status that reversibly changes according to an electric pulse applied between the first electrode and the second electrode, the estimation device comprising:

• an obtainment unit configured to obtain, when changes are made to the resistive status of the local region, measurement values each indicating a resistance state after one of the changes;
• and
• a determination unit configured to determine, based on a distribution of the obtained measurement values, an estimated amount of a physical parameter regarding structural characteristics of the local region by a calculation.