PLASMA EROSION RESISTED TRANSPARENT Mg-Al-Y-Si-O
OwnerRen-Guan DUAN, Juan Carlos ROCHA- ALVAREZinventors
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Abstract
Embodiments of the invention generally relate to a transparent material having an increased resistance to plasma erosion. The material is formed from yttrium oxide (Y203) at a starting powder composition ranging from about 5 weight percent (wt %) to about 40 weight percent; aluminum oxide (Al203) at a starting powder composition ranging from about 5 weight percent to about 30 weight percent; silicon dioxide (SiO2) at a starting powder composition ranging from about 10 weight percent to about 80 weight percent; and magnesium oxide (MgO) at a starting powder composition ranging from about 1 weight percent to about 20 weight percent. The material may be a glass or glass-ceramic.
Claims15
A transparent article which is resistant to erosion by halogen-containing plasmas, the article formed from yttrium oxide within a range from about 5 weight percent (wt %) to about 40 weight percent;
- aluminum oxide within a range from about 5 weight percent to about 30 weight percent;
- silicon dioxide within a range ranging from about 10 weight percent to about 80 weight percent;
- and magnesium oxide within a range from about 1 weight percent to about 20 weight percent.
A method of processing a material, comprising:
- combining:
- yttrium oxide within a range from about 5 weight percent (wt %) to about 40 weight percent;
- aluminum oxide within a range from about 5 weight percent to about 30 weight percent;
- silicon dioxide within a range ranging from about 10 weight percent to about 80 weight percent;
- and
- magnesium oxide within a range from about 1 weight percent to about 20 weight percent;
- and
- heating the combined materials.
Dependencies are inferred from the claim text.