Reinforcement ring for carrier head
AssigneeApplied Materials, Inc.
InventorsJamie Stuart Leighton, Stacy Meyer, Young J. Paik
Life of this patent
Estimating the term…
Abstract
A reinforcement ring is for placement in a carrier head to abut an inner surface of a perimeter portion of a flexible membrane. The reinforcement ring includes a substantially vertical cylindrical portion, a first flange projecting inwardly from the bottom of the cylindrical portion, and a second flange projecting outwardly from a bottom of the cylindrical portion. The second flange projects downwardly at a non-zero angle from vertical.
Claims18
A reinforcement ring for placement in a carrier head to abut an inner surface of a perimeter portion of a flexible membrane, comprising:
- a substantially vertical cylindrical portion;
- a first flange projecting inwardly from the bottom of the cylindrical portion, the second flange projecting downwardly at a non-zero angle from vertical;
- and
- a second flange projecting outwardly from a bottom of the cylindrical portion.
A carrier head for a chemical mechanical polishing system, comprising:
- a base assembly;
- a retaining ring secured to the base assembly;
- a flexible membrane secured to the base assembly, the flexible membrane including
- a main portion with a lower surface to provide a substrate-mounting surface,
- an annular outer portion extending upwardly from an outer edge of the main portion, the annular outer portion having a lower edge connected to the main portion and an upper edge, and
- a plurality of annular flaps connected to the base assembly to divide a volume between the main portion and the base assembly into a plurality of chambers, the plurality of annular flaps including a first annular flap joined to an inner surface of the main portion;
- and
- a reinforcement ring including a substantially vertical cylindrical portion abutting an inner surface of the annular outer portion, and a first flange projecting inwardly from the bottom of the cylindrical portion without contacting the first annular flap, the first flange projecting downwardly at a non-zero angle from vertical.
Dependencies are inferred from the claim text.