Wet Processing Systems and Methods with Replenishment

A method for processing a substrate, the method comprising:

• providing a substrate having a plurality of site-isolated regions defined thereon;
• and
• performing a wet process on each of the site-isolated regions defined on the substrate, and wherein the performing comprises:
• exposing each of the plurality of site-isolated regions to a one of a plurality of formulations by dispensing one of the plurality of formulations onto the respective site-isolated region, wherein each of the plurality of the formulations comprises a component;
• adding the component to at least some of the plurality of formulations during the exposing and after the cessation of the dispensing of the plurality of formulations;
• and
• varying at least one processing condition between at least two of the plurality of formulations in a combinatorial manner.

A wet processing tool comprising:

• a housing defining a processing chamber;
• a substrate support coupled to the housing and configured to support a substrate within the processing chamber;
• a plurality of reactors coupled to the housing, each of the plurality of reactors being positioned to define one of a plurality of site-isolated regions on the substrate and configured to hold a liquid on the respective one of the plurality of site-isolated regions;
• a fluid supply system coupled to the plurality of reactors and configured to
• (i) dispense one of a plurality of formulations into one of the plurality of reactors, wherein each of the formulations comprises a component, and
• (ii) dispense the respective component into at least some of the plurality of reactors;
• and
• a control system coupled to the fluid supply system, the control system being configured to:
• dispense one of the plurality formulations into the respective reactor to perform a wet process, wherein the wet process is performed on the site-isolated region defined on the substrate;
• add the respective component to at least some of the plurality of formulations during the performing of the wet process;
• and
• vary a processing condition between at least two of the plurality of formulations in a combinatorial manner.