Methods for fabricating guide patterns and methods for fabricating integrated circuits using such guide patterns
AssigneeGlobalfoundries Inc.
InventorsGerard M. Schmid, Richard Farrell
Life of this patent
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Abstract
Methods for fabricating guide patterns and methods for fabricating integrated circuits using guide patterns are provided. In an embodiment, a method for fabricating a guide pattern includes forming a coating of a material with latent grafting sites and a photosensitive component configured to activate the latent grafting sites upon exposure over a substrate. The method exposes selected latent grafting sites in the coating to convert the selected latent grafting sites to active grafting sites. A grafting agent is bonded to the active grafting sites to form the guide pattern.
Claims20
A method for fabricating a guide pattern comprising:
- forming a coating of a material including latent grafting sites and a photosensitive component configured to activate the latent grafting sites upon exposure over a substrate;
- exposing selected latent grafting sites in the coating to convert the selected latent grafting sites to active grafting sites;
- and
- bonding a grafting agent to the active grafting sites to form the guide pattern.
A method for fabricating an integrated circuit comprising:
- forming a guide pattern comprising:
- depositing a coating of a material including latent grafting sites and a photosensitive component configured to activate the latent grafting sites upon exposure over a substrate;
- exposing selected latent grafting sites in the coating to convert the selected latent grafting sites to active grafting sites;
- and
- bonding a grafting agent to the active grafting sites to form the guide pattern;
- contacting a directed self-assembly (DSA) material to the grafting agent and forming a mask;
- and
- processing a semiconductor substrate through the mask to form the integrated circuit.
A method for fabricating a guide pattern on a substrate comprising:
- providing a substrate including a material having latent grafting sites;
- activating selected latent grafting sites in the material to convert the selected latent grafting sites to active grafting sites;
- and
- bonding a grafting agent to the active grafting sites.
Dependencies are inferred from the claim text.