Multizone control of lamps in a conical lamphead using pyrometers

A substrate processing apparatus, comprising:

• a vacuum chamber comprising a dome and a floor;
• a substrate support having low thermal mass disposed inside the vacuum chamber;
• a plurality of thermal lamps arranged in a lamphead and positioned proximate the floor of the vacuum chamber;
• a reflector disposed proximate the dome, the reflector and the dome together defining a thermal control space;
• a plurality of power supplies coupled to the thermal lamps;
• and
• a controller for adjusting the power supplies to control a temperature in the vacuum chamber.

A method of processing a substrate, comprising:

• disposing the substrate in a chamber having a floor and a dome;
• heating the substrate by transmitting radiation from a plurality of lamps through the floor;
• reflecting a radiation emitted by the substrate with a reflector disposed proximate the dome, the reflector and the dome together defining a thermal control space;
• depositing a layer on the substrate by flowing a precursor gas across the substrate substantially parallel to a surface of the substrate;
• detecting a first temperature at a first zone of the substrate using a first sensor disposed proximate the floor;
• detecting a second temperature at a second zone of the substrate using a second sensor disposed proximate the floor;
• adjusting power to a first portion of the plurality of lamps based on the first temperature;
• and
• adjusting power to a second portion of the plurality of lamps based on the second temperature.