Inject insert liner assemblies for chemical vapor deposition systems and methods of using same

A system for depositing a layer on a substrate, the system comprising:

• a processing chamber;
• a gas injecting port for introducing gas into the system, the gas injecting port disposed upstream from the processing chamber;
• a gas distribution plate disposed between the gas injecting port and the processing chamber, the gas distribution plate including holes therein;
• and
• an inject insert liner assembly received within the system adjacent to the gas distribution plate and upstream from the processing chamber, the inject insert liner assembly defining gas flow channels therein extending along a lengthwise direction of the system, each channel having an inlet adjacent to the gas distribution plate and an outlet downstream from the inlet, and each channel being tapered along the lengthwise direction of the system in at least one of a vertical or horizontal direction.

A method of depositing a layer on a substrate disposed within a processing chamber within a deposition system including a gas distribution plate in fluid communication with a gas injecting port and the processing chamber, the method comprising the steps of:

• introducing a process gas into the system from the gas injecting port, the gas injecting port disposed upstream from the processing chamber;
• flowing the process gas through a flow channel extending along a lengthwise direction of the system and being tapered along the lengthwise direction of the system in at least one of a vertical or horizontal direction, wherein the flow channel is defined by an inject insert liner assembly adjacent to the gas distribution plate;
• and
• depositing a layer on the substrate.