Portable Wireless Sensor
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHsu-Shui Liu, Yeh-Chieh Wang, Jiun-Rong Pai
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Abstract
The present disclosure provides an apparatus for fabricating a semiconductor device. The apparatus includes a portable device. The portable device includes first and second sensors that respectively measure first and second fabrication process parameters. The first fabrication process parameter is different from the second fabrication process parameter. The portable device also includes a wireless transceiver that is coupled to the first and second sensors. The wireless transceiver receives the first and second fabrication process parameters and transmits wireless signals containing the first and second fabrication process parameters.
Claims20
An apparatus for obtaining data, the apparatus comprising:
- a sensor interface communicatively coupled to at least one sensor and operable to receive sensing data from the coupled at least one sensor;
- a micro-controller communicatively coupled to the sensor interface and operable to encode the sensing data received by the sensor interface;
- and
- a transceiver communicatively coupled to the micro-controller and operable to wirelessly transmit the encoded sensing data to a diagnostic system, wherein the transceiver is further operable to receive a wireless signal causing an adjustment to an operation of an associated fabrication tool.
An apparatus for fabricating a semiconductor device, the apparatus comprising:
- at least two analog sensors that are operable to measure at least two different processing parameters and to produce fabrication data from the at least two different processing parameters;
- a controller operable to modulate the fabrication data according to a predetermined modulation scheme;
- and
- a wireless transceiver operable to transmit a first wireless signal containing the modulated fabrication data to a diagnostic tool and to receive a second wireless signal configured to adjust a fabrication process,
- wherein the apparatus is operable to adjust the fabrication process according to the second wireless signal.
A method of fabricating a semiconductor device, the method comprising:
- measuring at least one fabrication process parameter using at least one sensor;
- wirelessly providing a first wireless signal communicating the at least one fabrication process parameter to a diagnostic system;
- wirelessly receiving from the diagnostic system a second wireless signal communicating an adjustment to a semiconductor device fabrication process;
- implementing the adjustment to the semiconductor device fabrication process;
- and
- fabricating the semiconductor device according to the implemented adjustment.
Dependencies are inferred from the claim text.