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US 2014/0273283 A1Published application
Forming magnetic microelectromechanical inductive components
AssigneeInternational Business Machines Corporation
InventorsWilliam J. Gallagher, Eugene J. O'Sullivan, Naigang Wang
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Abstract
A micro-electromechanical device and method of manufacture are disclosed. A sacrificial layer is formed on a silicon substrate. A metal layer is formed on a top surface of the sacrificial layer. Soft magnetic material is electrolessly deposited on the metal layer to manufacture the micro-electromechanical device. The sacrificial layer is removed to produce a metal beam separated from the silicon substrate by a space.
Claims8
A micro-electromechanical device, comprising:
- a wafer substrate;
- a metal layer coupled to at least one support structure to be suspended with respect to the wafer substrate;
- and
- a soft magnetic material electrolessly deposited on the metal layer.
1 more element
Dependencies are inferred from the claim text.