Surface modification, functionalization and integration of microfluidics and biosensor to form a biochip
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYi-Shao LIU, Chun-Wen CHENG, Chun-Ren CHENG
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Abstract
The present disclosure provides methods of fabricating a biochip. The biochip includes a fluidic part, having through-substrate holes as inlets and outlets, and a sensing part bonded together using a bonding material. One or both of the parts has microfluidic channel patterns and one or more patterned surface modification layers formed using different methods to provide surface property for binding bioreceptors and for flowing analytes. The patterning includes lithography, etching, washing, selective depositing using printing or self-assembly of surface chemistry.
Claims20
A method of manufacturing a biochip, comprising:
- providing a fluidic substrate;
- depositing a surface modification layer over the fluidic substrate;
- forming a bonding material pattern on the fluidic substrate;
- forming through-holes in the fluidic substrate;
- providing a sensing wafer having one or more modified surface patterns having different surface properties;
- bonding the sensing wafer and the fluidic substrate via the bonding material.
A method of manufacturing a biochip, comprising:
- providing a first substrate;
- forming a patterned first surface modification layer on the first substrate;
- forming a patterned second surface modification layer on the first substrate, wherein the first surface modification layer and the second surface modification layer provide different surface properties;
- patterning a photoresist on the first substrate;
- removing a portion of the first surface modification layer exposed through the patterned photoresist;
- depositing a sidewall structure material over the first substrate;
- forming through-holes in the first substrate;
- patterning the sidewall structure material;
- forming a bonding material layer;
- and,
- bonding the first substrate to a second substrate via the bonding material layer.
Dependencies are inferred from the claim text.