Method to Improve LiCoO2 Morphology in Thin Film Batteries
AssigneeApple Inc.
InventorsLili Huang, Richard M. Mank, Yanfeng Chen
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Abstract
A method for improving the lithium cobalt oxide (LiCoO2) film (such as films in thin film batteries) morphology includes using oxygen (O2) and argon (Ar) gases during sputtering deposition of the LiCoO2 film. This may allow for the manufacturing of thicker LiCoO2 films. Such a method may also significantly reduce or eliminate cracking and obvious columnar structures within the resulting LiCoO2 film layer. Sputtering using a mixture of O2 and Ar also may produce a LiCoO2 film layer that requires lower annealing temperatures to reach good utilization and has higher lithium diffusion rates.
Claims20
A method for creating a lithium cobalt oxide (LiCo02) film layer in a battery core, comprising:
- depositing a LiCo02 film layer by sputtering LiCo02 with a sputtering gas, wherein the sputtering gas is a predetermined mixture of oxygen and argon;
- and
- annealing the LiCo02 film layer at a predetermined temperature to achieve a resulting LiCo02 film with generally no film cracking.
A method of creating a multiple layer lithium cobalt oxide (LiCo02) film in a battery core, comprising:
- depositing a first LiCo02 film layer by sputtering LiCo02 with a sputtering gas, wherein the sputtering gas is a predetermined mixture of oxygen and argon;
- and
- annealing the first LiCo02 film layer at a predetermined temperature to achieve a resulting LiCo02 film with generally no film cracking;
- and
- depositing a second LiCo02 film layer on the first LiCo02 film layer by sputtering LiCo02 with argon gas.
A battery core, comprising:
- a cathode layer,
- a cathode current collector layer coupled to the cathode layer;
- and
- a substrate coupled to the cathode current collector layer;
- wherein the cathode layer comprises a plurality of alternating first LiCoO2 film layers and second LiCoO2 film layers, the first LiCoO2 film layers are deposited by sputtering LiCo02 with a predetermined mixture of oxygen and argon, the first LiCoO2 film layers are annealed at a predetermined temperature to achieve a resulting LiCo02 film with generally no film cracking, and the second LiCoO2 film layers are deposited on one of the first LiCoO2 film layers by sputtering LiCo02 with argon gas.
Dependencies are inferred from the claim text.