Low-E Panel with Improved Barrier Layer Process Window and Method for Forming the Same
AssigneeIntermolecular, Inc.
InventorsGuowen Ding, Brent Boyce, Minh Huu Le, Zhi-Wen Wen Sun, Yu Wang
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Abstract
Embodiments provided herein describe low-e panels and methods for forming low-e panels. A transparent substrate is provided. A reflective layer is formed above the transparent substrate. A barrier layer is formed above the reflective layer. A nitride-containing layer is formed above the barrier layer. The nitride-containing layer has a thickness that is 1 nm or less. A over-coating layer is formed above the nitride-containing layer. The over-coating layer includes a different material than that of the nitride-containing layer.
Claims20
A method for forming a low-e panel, the method comprising:
- providing a transparent substrate;
- forming a reflective layer above the transparent substrate;
- forming a barrier layer above the reflective layer;
- forming a nitride-containing layer above the barrier layer, the nitride-containing layer having a thickness that is 1 nm or less;
- and
- forming an over-coating layer above the nitride-containing layer, the over-coating layer comprising a different material than that of the nitride-containing layer.
A method for forming a low-e panel, the method comprising:
- providing a transparent substrate;
- forming a reflective layer above the transparent substrate;
- forming a barrier layer above the reflective layer;
- forming a nitride-containing layer above and adjacent to the barrier layer, the nitride-containing layer comprising zinc and having a thickness that is 1 nm or less;
- and
- forming an over-coating layer above the nitride-containing layer, the over-coating layer comprising a different material than that of the nitride-containing layer.
A low-e panel comprising:
- a transparent substrate;
- a reflective layer formed above the transparent substrate;
- a barrier layer formed above the reflective layer;
- a nitride-containing layer formed above the barrier layer, the nitride-containing layer having a thickness that is 1 nm or less;
- and
- an over-coating layer formed above the nitride-containing layer, the over-coating layer comprising a different material than that of the nitride-containing layer.
Dependencies are inferred from the claim text.