Thermal treated sandwich structure layer to improve adhesive strength

A method for protecting a surface of a chamber component, comprising:

• applying an adhesive layer onto the surface of the chamber component to be protected;
• applying a protective layer onto the adhesive layer;
• thermally treating the chamber component;
• and thereby
• forming a graded layer having a graded increase in a coefficient of thermal expansion increasing from the surface thereof closest to the chamber component and highest in a portion thereof closest to the protective layer.

A protective coating for a substrate support structure comprising:

• a first layer;
• an adhesive layer disposed on the first layer;
• a protective layer disposed on the adhesive layer;
• a first interdiffused layer formed of at least a portion of the adhesive layer and a portion of the first layer wherein the first interdiffused layer has a thermal property gradually changing from the first layer to the adhesive layer;
• and
• a second interdiffused layer formed of at least a portion of the adhesive layer and a portion of the protective layer wherein the second interdiffused layer has a different thermal property than the adhesive layer and the protective layer.